The Clean Suite Series of Air Filtration Products from Cambridge
   
 
(Datasheet.PDF)
  Ion Gun Clean Suite Series
The Cambridge Ion Gun prevents surface ESD in semiconductor fab processes. Its features include a EUV (soft X-Ray) system that provides high ionization levels with zero contaminant generation, ozone-less clean air preventing surface oxidization, and it may be implemented for ESD prevention in a variety of applications. Contact a sales representative for more information.
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